Caldwell 320

Depth-resolved Cathodoluminescence Spectroscopy (DRCLS)

Extending the CLS techniques are two glancing incidence, 0.1 – 5 keV electron gun systems in UHV chambers equipped with a variety of more conventional surface science techniques. A set of prism and grating monochromators equipped with infrared, visible, and UV – sensitive photodetectors are used for spectral analysis. This design for the nanoscale depth-resolved cathodoluminescence spectroscopy (DRCLS) excitation and collection optics has now been adapted for use in other UHV chambers at Ohio State, specifically into modules containing deposition, growth, high resolution X-ray photoemission spectroscopy (XPS), Auger electron spectroscopy (AES), and remote plasma surface treatments.